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Scope of business
High-purity industrial gas system
High-purity gas piping technology is an essential component of high-purity gas supply systems and represents the key technology determining whether high-purity gases meeting specified requirements can be delivered to the point of use while maintaining their qualified quality. The so-called high-purity gas piping technology encompasses aspects such as proper system design, selection of appropriate pipe fittings and accessories, construction and installation, and testing and commissioning.
Types of Common Gases: Classification of Common Gases in the Electronics Industry—General Gases, also known as Bulk Gases: hydrogen (H2), nitrogen (N2), oxygen (O2), argon (Ar), and others. Specialty Gases primarily include SiH4, PH3, B2H6, AsH3, Cl2, HCl, CF4, NH3, POCl3, SiH2Cl2, SiHCl3, NH3, BCl3, SiF4, ClF3, CO, C2F6, N2O, F2, HF, HBr, SF6, and many other specialized gases. The types of special gases are generally categorized into corrosive, toxic, flammable, combustible, and inert gases. The following is a common classification of semiconductor gases:
(1) Corrosivity / Toxicity: HCl, BF3, WF6, HBr, SiH2Cl2, NH3, PH3, Cl2, BCl3, etc.
(2) Flammability: H2, CH4, SiH4, PH3, AsH3, SiH2Cl2, B2H6, CH2F2, CH3F, CO, etc.
(3) Combustion-promoting properties: O2, Cl2, N2O, NF3, etc.
(4) Inertness: Many semiconductor gases, such as N2, CF4, C2F6, C4F8, SF6, CO2, Ne, Kr, and He, are harmful to the human body.
In particular, certain gases such as SiH4 are spontaneously combustible—once leaked, they will react violently with oxygen in the air and immediately ignite. Moreover, AsH3 is highly toxic; even the slightest leak could pose a serious threat to human life. It is precisely because of these obvious hazards that the requirements for system design safety are exceptionally high.
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