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Branch Valve Box / Expansion Valve Box TB/FTB
The T-BOX expansion valve box is an expansion valve box used in control systems for semiconductor equipment. Typically, the T-BOX expansion valve box for semiconductor equipment is employed to extend and integrate additional control devices and valves, thereby meeting the requirements of the semiconductor manufacturing process. The FT-BOX, on the other hand, is generally used for system expansion and is installed at the end of the system as a valve box.
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Specialty Gases & Chemical Products
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- Product Description
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In the chemical supply system, both the FT-BOX and the T-BOX have their own distinct features and functions. The following is an introduction to each of them:
FT - BOX
Generally referred to as branch valve manifolds or expansion valve manifolds, these devices are typically installed at the end of a system and serve primarily for system expansion. Their function is to further distribute chemicals from the main pipeline into finer branch lines, thereby meeting the chemical requirements of a greater number of different pieces of equipment or processes. Think of them as “terminal distributors,” enabling precise delivery of chemicals to all the areas that need them. The choice of material depends on the properties of the chemicals being conveyed: For acidic and alkaline chemicals, the housing is commonly made of PP, while the internal fittings are made of PFA; for organic solvents and corrosive chemical solvents, the housing is usually made of SUS, with internal fittings either made of SUS or PFA.
T - BOX
Typically referred to as a Tee Box, this component is primarily used when the main supply line needs to connect to multiple Valve Manifold Boxes (VMBs). It serves as a critical junction for branching off from the main line, enabling the smooth distribution of chemicals from the main line to various branch lines. Through the T-BOX, chemicals can be efficiently diverted from the main line to different branches, thereby supplying chemicals to diverse pieces of equipment or process steps. For example, in a semiconductor chip manufacturing facility, the T-BOX can distribute chemicals from the chemical supply unit to equipment used for processes such as cleaning impurities from chip surfaces and etching chip patterns. In terms of materials, similar to the FT-BOX, when conveying acidic or alkaline chemicals, the outer casing is made of PP material while the internal fittings are made of PFA; when handling organic solvents or corrosive solvent chemicals, the outer casing is made of SUS material, and the internal fittings are either SUS or PFA.
Overall, both FT-BOX and T-BOX are important components used for pipeline distribution in chemical supply systems; they differ only in their positions within the system and their specific roles in flow diversion.
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